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dc.contributor.authorKittikhun Seawsakulen_US
dc.contributor.authorMati Horprathumen_US
dc.contributor.authorPitak Eiamchaien_US
dc.contributor.authorViyapol Pattantsetakulen_US
dc.contributor.authorSaksorn Limwicheanen_US
dc.contributor.authorChanunthorn Chananonnawathornen_US
dc.contributor.authorPennapa Muthitamongkolen_US
dc.contributor.authorChanchana Thanachayanonten_US
dc.contributor.authorAnnop Klamchuenen_US
dc.contributor.authorTuksadon Wutikhunen_US
dc.contributor.authorHideki Nakajimaen_US
dc.contributor.authorMiskawan Sripakdeeen_US
dc.contributor.authorPrayoon Songsiriritthigulen_US
dc.identifier.citationChiang Mai Journal of Science 47,4 (Special Issue II : July 2020), p.815-822en_US
dc.descriptionThe Chiang Mai Journal of Science is an international English language peer-reviewed journal which is published in open access electronic format 6 times a year in January, March, May, July, September and November by the Faculty of Science, Chiang Mai University. Manuscripts in most areas of science are welcomed except in areas such as agriculture, engineering and medical science which are outside the scope of the Journal. Currently, we focus on manuscripts in biology, chemistry, physics, materials science and environmental science. Papers in mathematics statistics and computer science are also included but should be of an applied nature rather than purely theoretical. Manuscripts describing experiments on humans or animals are required to provide proof that all experiments have been carried out according to the ethical regulations of the respective institutional and/or governmental authorities and this should be clearly stated in the manuscript itself. The Editor reserves the right to reject manuscripts that fail to do so.en_US
dc.description.abstractIn this work, the nanocolumnar AZO thin film was deposited on glass slide and silicon wafer (100) substrate by dc pulsed magnetron sputtering with glancing angle deposition (GLAD) technique on the silicon (100) wafer and glass slide substrate. The influences of annealing treatment on the nanocolumnar AZO thin films prepared in different temperature at 200 – 400 C for 3 hours in vacuum were investigated. The physical morphologies, optical and electrical properties of the vertically aligned nanocolumnar AZO thin films were investigated using grazing incident X-ray diffraction (GIXRD), field-emission scanning electron microscope (FE-SEM), transmission electron microscope (TEM), UV-Vis-NIR spectrophotometer with angle-dependent technique and Hall-effect measurement. The crystal structure analysis from GIXRD indicated that as-deposited and annealed nanocolumnar AZO films were crystalline with wurtzite structure. In addition, the results show that the optimum annealed temperature of 400 C was the most valuable to improve the optical transmission in visible region (86.6%) with omnidirectional anti-reflection property and low resistivity (1.70 10-3 Ω·cm) of nanocolumnar AZO films.en_US
dc.publisherFaculty of Science, Chiang Mai Universityen_US
dc.subjectpulsed dc magnetron sputteringen_US
dc.subjectvacuum annealingen_US
dc.titleInfluence of Vacuum Annealing Temperature on Structural, Optical and Electrical of Nanocolumnar AZO Films for TCO Applicationen_US
Appears in Collections:CMUL: Journal Articles

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