Effect of C<inf>2</inf>H<inf>2</inf> flow rates and microwave powers on the synthesis of sp<sup>3</sup> carbon on glass substrates

Abstract

© 2015, Hanyang University. All rights reserved. In this research, sp³ and sp² carbon was deposited on glass substrates in 10-100 ml/min flow rates of C<inf>2</inf>H<inf>2</inf> at 650, 750 and 900 W microwave for 5 sec each. Raman analysis revealed the presence of sp³ and sp² carbon at 1534-1599 and 1325-1377 cm−1, corresponding to the G and D bands, respectively. Both sp³ and sp² contents were controlled by the C<inf>2</inf>H<inf>2</inf> flow rates and microwave powers. By using X-ray diffraction (XRD), selected area electron diffraction (SAED), atomic force microscopy (AFM) and scanning electron microscopy (SEM), the carbon films of nanoparticle colonies were detected.