Browsing by Author Harry J. Whitlow
Showing results 6 to 6 of 6
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| Issue Date | Title | Author(s) |
|---|---|---|
| 1-Dec-2007 | Resolution performance of programmable proximity aperture MeV ion beam lithography system | Sergey Gorelick; Timo Sajavaara; Mikko Laitinen; Nitipon Puttaraksa; Harry J. Whitlow |